A new method for vacuum sealing of flat-panel photosensors
نویسندگان
چکیده
Photon detectors are indispensable in many areas of fundamental physics research, particularly in the emerging field of particle astrophysics, as well as in medical imaging and nuclear non-proliferation. For a significant progress in all these areas a new, inexpensive industrial massproduction photosensor technology is needed. In order to reach that goal we have introduced several innovations. This paper focuses on one of them, the ReFerence flat-panel photon detector. We report on the prototype development, and in particular on the development of a new oxidation-free method for vacuum sealing of glass panel surfaces with liquid indium, at processing temperatures below 360 1C. r 2006 Elsevier B.V. All rights reserved. PACS: 9.90.+r; 07.90.+c
منابع مشابه
Vacuum In-line Sealing Technology of the Screen-printed CNT-FEA
We have fabricated a carbon nanotube field emission display (CNT-FED) panel with a 2-inch diagonal size by using a screen printing method and vacuum in-line sealing technology. The sealing temperature of the panel was around 390 °C and the vacuum level was obtained with 1.4×10torr at the sealing. When the field emission properties of a fabricated and sealed CNT-FED panel were characterized and ...
متن کاملAmorphous Silicon Flat Panel Imagers for Medical Application
A new gamma camera based on hydrogenated amorphous silicon (a-Si:H) pixel arrays to be used in nuclear medicine is introduced. Various performance characteristics of a-Si:H imagers are reviewed and compared with those of currently used equipment. An important component in the a-Si:H imager is the scintillator screen. A new approach for fabrication of high resolution CsI(Tl) scintillator layers,...
متن کاملFabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method
The fabrication of SiC MEMS pressure sensor based on novel vacuum-sealed method is presented in this paper. The sensor was fabricated using surface micromachining. Due to its excellent mechanical properties and high chemical resistance, PECVD (Plasma Enhanced Chemical Vapor Deposition) SiC was chosen as structural material. Polyimide is the sacrificial layer which solve stiction problem in proc...
متن کاملVacuum sealing drainage therapy in the presence of an external fixation device
RATIONALE Vacuum sealing drainage (VSD) is widely utilized for treating traumatic wounds. PATIENT CONCERNS It is particularly difficult and time consuming to use in combination with an external fixator. DIAGNOSES This is because the hardware or pins used for fixation interfere with maintaining a seal, resulting in poor adhesion and subsequent air leakage. INTERVENTIONS To resolve this pro...
متن کاملWafer-scale Vacuum and Liquid Packaging Concepts for an Optical Thin-film Gas Sensor
This thesis treats the development of packaging and integration methods for the cost-efficient encapsulation and packaging of microelectromechanical (MEMS) devices. The packaging of MEMS devices is often more costly than the device itself, partly because the packaging can be crucial for the performance of the device. For devices which contain liquids or needs to be enclosed in a vacuum, the pac...
متن کامل